Line Profile Measurement for SEM Imaging System
نویسندگان
چکیده
The performance of scanning electron microscope can be defined in terms of parameters such as the spatial resolution, and the signal to noise ratio of the image. Knowledge of these quantities is important in verifying that an instrument meets its specification, and subsequently for tracking and optimizing its performance during use. Analytical methods based on the power spectrum (2-D Fourier transform analysis) of images are now beginning to be used for these purposes but care must be exercised to ensure reliable and meaningful results. In this paper, one new method, line profiler, is suggested which can offer more detailed information about the microscope performance while avoiding the pitfalls of the simpler techniques.
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